Industrial-scale deposition of highly uniform and precise optical interference filters by the use of an improved cylindrical magnetron sputtering system-Reference-Cited by-同舟云学术

Industrial-scale deposition of highly uniform and precise optical interference filters by the use of an improved cylindrical magnetron sputtering system

Published:2015-04 Issue: Volume:267 Page:53-58
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Vergöhl Michael,Bruns Stefan^ORCID,Rademacher Daniel,Bräuer Günter

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference14 articles.

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3. Optical properties and environmental stability of oxide coatings deposited by reactive sputtering

4. Magnetron sputtering: a review of recent developments and applications

5. SVC — 45th Annual Technical Conference Proceedings, Lake Buena, Florida, U.S.A., April 13–18, 2002;De Bosscher,2002

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