Author:
Melzig Thomas,Amochkina Tatiana,Bruns Stefan,Henning Philipp,Terhürne Jörg,Trubetskov Michael,Vergöhl Michael
Funder
BMBF Berlin
Bundesministerium für Bildung und Forschung
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference15 articles.
1. High accurate in situ optical thickness monitoring for multilayer coatings;Zoeller;SVC Annual Technical Conference Proceedings,2004
2. Optical broadband monitoring of conventional and ion processes;Ristau;Appl. Optics,2006
3. State of the art in deterministic production of optical thin films;Ristau;SPIE,2008
4. Broadband optical monitoring combined with additional rate measurement for accurate and robust coating processes;Waldner;Optical Interference Coatings,2010
5. Improving optical thickness monitoring by including systematic and process-influenced transmittance deviations;Bruns;Appl. Optics,2023
Cited by
2 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献