Author:
Bobzin K.,Brögelmann T.,Kruppe N.C.
Funder
German Research Foundation
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference12 articles.
1. Revised structure zone model for thin film physical structure;Messier;J. Vac. Sci. Technol. A,1984
2. Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings;Thornton;J. Vac. Sci. Technol.,1974
3. A review comparing cathodic arcs and high power impulse magnetron sputtering (HiPIMS);Anders;Surf. Coat. Technol.,2014
4. Handbook of Physical Vapor Deposition (PVD) Processing;Mattox,2010
5. A. Lamb; Weston Electric Instrument Corp; Bimetallic thermometer; US2597939A; 1946.
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