A Real-Time In Situ Wafer Temperature Measurement System Based on Fiber Bragg Grating Array-Reference-Cited by-同舟云学术

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A Real-Time In Situ Wafer Temperature Measurement System Based on Fiber Bragg Grating Array

Published:2024-06-01 Issue:11 Volume:24 Page:17733-17741
ISSN:1530-437X
Container-title:IEEE Sensors Journal
language:
Short-container-title:IEEE Sensors J.

Author:

Feng Yuhao¹^ORCID,Peng Jingjing²,Wu Tao²,Xing Fei³^ORCID,Sun Ting¹^ORCID

Affiliation:

1. School of Instrument Science and Opto-Electronics Engineering, Beijing Information Science and Technology University, Beijing, China

2. State Key Laboratory of Precision Measurement Technology and Instruments, Tsinghua University, Beijing, China

3. Department of Precision Instrument, Tsinghua University, Beijing, China

Funder

National Natural Science Foundation of China

Optoelectronic Measurement and Intelligent Perception Zhongguancun Open Laboratory, and Space Optoelectronic Measurement and Perception Laboratory, Beijing Institute of Control Engineering

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Link

http://xplorestaging.ieee.org/ielx7/7361/10546898/10505152.pdf?arnumber=10505152

Reference40 articles.

1. Growth of ZnO thin film on p-GaN/sapphire (0001) by simple hydrothermal technique

2. Enhanced PVD process control by online substrate temperature measurement

3. Influence of ALD temperature on thin film conformality: Investigation with microscopic lateral high-aspect-ratio structures

4. Temperature measurement in RTP: Past and future

5. Investigation of Dynamical Temperature Behaviour in Rtp

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