Study on In–Zn–Sn–O and In–Sn–Zn–O films deposited on PET substrate by magnetron co-sputtering system
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference21 articles.
1. Preparation of high quality ITO films on a plastic substrate using RF magnetron sputtering
2. Thin films engineering of indium tin oxide: Large area flat panel displays application
3. Electrical and Optical Properties of In2O3–ZnO Films Deposited on Polyethylene Terephthalate Substrates by Radio Frequency Magnetron Sputtering
4. Characteristics of IZSO films deposited by a co-sputtering system
5. Comparative study on structure and internal stress in tin-doped indium oxide and indium-zinc oxide films deposited by r.f. magnetron sputtering
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2. Low-temperature high-performance In-Ga-Sn-O thin-film transistors with Al2O3 grown by a facile dual-atomic layer deposition;Journal of Alloys and Compounds;2021-09
3. The Characteristics of Aluminum-Gallium-Zinc-Oxide Ultraviolet Phototransistors by Co-Sputtering Method;Electronics;2021-03-09
4. Hydrogen-driven dramatically improved mechanical properties of amorphized ITO–Ag–ITO thin films;RSC Advances;2021
5. Effects of Zn Ratio Tuning on the Structural and Transport Properties of Amorphous Indium Zinc Tin Oxide Thin Films;Journal of Electronic Materials;2020-10-13
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