Comparative study on structure and internal stress in tin-doped indium oxide and indium-zinc oxide films deposited by r.f. magnetron sputtering

Author:

Sasabayashi T,Ito N,Nishimura E,Kon M,Song P.K,Utsumi K,Kaijo A,Shigesato Y

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference11 articles.

1. Stress-related effects in thin films

2. Evaporated Sn‐doped In2O3films: Basic optical properties and applications to energy‐efficient windows

3. Doping mechanisms of tin‐doped indium oxide films

4. Study of the effect of Sn doping on the electronic transport properties of thin film indium oxide

5. A. Kaijyo, K. Inoue, S. Matsyzaki, Y. Shigesato, Proceedings for the Fourth Pacific Rim International Conference on Advanced Materials and Processing (PRICM-4), vol. 2 (2001) 1787

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