Author:
Lee Jung Rak,Kim Do Geun,Lee Gun Hwan,Park Yong Ho,Song Pung Keun
Publisher
Springer Science and Business Media LLC
Subject
Materials Chemistry,Metals and Alloys,Mechanics of Materials,Condensed Matter Physics
Reference10 articles.
1. H. Koh, K. Sawada, M. Ogawara, T. Kuwata, M. Akatsuka, and M. Matsuhiro,SID Dig. Tech. Pap. 19, 53 (1988).
2. Z. C. Jin, I. Harmberg, and C. G. Granqvist,J. Appl. Phys. 64, 5517 (1988).
3. G. Frank and H. Kostlin,Appl. Phys. A 27, 197 (1982).
4. T. Maruyama and K. Fukui,Thin Solid Films 203, 297 (1991).
5. Y. Sato, R. Tokumaru, E. Nishimura, P. K. Song, and Y. Shigesato,J. Vac. Sci. Technol. A 23, 1167 (2005).
Cited by
7 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献