Influence of external bias on the surface morphology of a-C:H films grown by electron cyclotron resonance chemical vapor deposition
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
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1. Raman spectroscopy of hydrogenated amorphous carbons
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5. Effect of substrate bias on the properties of diamondlike carbon films deposited using unbalanced magnetron sputtering
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4. Hydrogen stability in hydrogenated amorphous carbon films with polymer-like and diamond-like structure;Journal of Applied Physics;2012-11
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