Different carbon based thin films and their microtribological behaviour in MEMS applications-Reference-Cited by-同舟云学术

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Different carbon based thin films and their microtribological behaviour in MEMS applications

Published:2005-11 Issue:5-6 Volume:200 Page:1777-1782
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Bandorf Ralf,Lüthje Holger,Henke Cord,Wiebe Jens,Sick Jan-Hinrich,Küster Rolf

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference18 articles.

1. Modern Tribology Handbook, II;Erdemir,2001

2. Diamond-like amorphous carbon

3. Chemical, mechanical and tribological characterization of ultra-thin and hard amorphous carbon coatings as thin as 3.5 nm: recent developments

4. Nanoindentation measurements of amorphous carbon coatings

5. Applications of Diamond Films and Related Materials;Lettington,1991

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