Preparation of a-C:H/a-C:H:Si:O and a-C:H/a-C:H:Si multilayer coatings by PACVD-Reference-Cited by-同舟云学术

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Preparation of a-C:H/a-C:H:Si:O and a-C:H/a-C:H:Si multilayer coatings by PACVD

Published:2011-11 Issue:4 Volume:206 Page:623-629
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Bewilogua Klaus,Bialuch Ingmar,Ruske Hartmut,Weigel Kai

Funder

German Ministry for Education and Research

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference32 articles.

1. Application-oriented modifications of deposition processes for diamond-like-carbon-based coatings

2. Recent progress on the tribology of doped diamond-like and carbon alloy coatings: a review

3. Doping and Alloying Effects on DLC Coatings;Sánchez-López,2008

4. Constitution, microstructure, mechanical properties, and performance of magnetron-sputtered carbon films with additions of silicon

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