Optical and mechanical properties of amorphous Mg-Si-O-N thin films deposited by reactive magnetron sputtering-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Optical and mechanical properties of amorphous Mg-Si-O-N thin films deposited by reactive magnetron sputtering

Published:2019-08 Issue: Volume:372 Page:9-15
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Ali Sharafat,Paul Biplab^ORCID,Magnusson Roger,Ekström Erik,Pallier Camille,Jonson Bo,Eklund Per^ORCID,Birch Jens

Funder

VINNOVA

ÅForsk Foundation

European Research Council

Swedish Foundation for Strategic Research

Swedish Government Strategic Research Area in Materials Science on Functional Materials

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference33 articles.

1. Magnetron sputtering — milestones of 30 years;Bräuer;Vacuum,2010

2. Magnetron sputtering: a review of recent developments and applications;Kelly;Vacuum,2000

3. Reactive magnetron sputtering of thin films: present status and trends;Musil;Thin Solid Films,2005

4. Recent aspects concerning DC reactive magnetron sputtering of thin films: a review;Safi;Surf. Coat. Technol.,2000

5. Surface mechanics of functional thin films on glass surfaces;Barthel;Surf. Coat. Technol.,2006

Cited by 13 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effect of composition on the thermal properties and structure of M-Al-Si-O-N glasses, M = Na, Mg, Ca;Progress in Solid State Chemistry;2024-06

2. Effects of deposition temperature on the mechanical and structural properties of amorphous Al–Si–O thin films prepared by radio frequency magnetron sputtering;Thin Solid Films;2023-12

3. Effect of O/N content on the phase, morphology, and optical properties of titanium oxynitride thin films;Journal of Materials Science;2023-07

4. The effect of the Ar/N2 gas ratio on the structure and properties of Ta-Si-N coatings produced by magnetron sputtering of TaSi2 target;Surfaces and Interfaces;2023-04

5. Synthesis of Al Thin Films with High Optical Transmittance by DC Magnetron Sputtering Process Parameter Optimization;European Journal of Engineering and Technology Research;2023-03-21

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3