Effects of the dynamic cathode sheath on electron transport at the initial period of HiPIMS pulse studied by Langmuir probe measurements and 2D PIC-MCC simulation-Reference-Cited by-同舟云学术

Effects of the dynamic cathode sheath on electron transport at the initial period of HiPIMS pulse studied by Langmuir probe measurements and 2D PIC-MCC simulation

Published:2020-12 Issue: Volume:403 Page:126371
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Han Mingyue,Luo Yang,Li Hua,Xu Ye,Luo Sida,Xu Hao,Xu Changyun,Li LiuHe

Funder

National Science and Technology Major Project

National Defense fundamental research Major Project

Weapon Equipment Pre-Research Fund of China

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

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5. Short-and long-term plasma phenomena in a HiPIMS discharge;Poolcharuansin;Plasma Sources Sci. Technol.,2010

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