Domain epitaxial growth of Ta3N5 film on c-plane sapphire substrate-Reference-Cited by-同舟云学术

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Domain epitaxial growth of Ta3N5 film on c-plane sapphire substrate

Published:2022-08 Issue: Volume:443 Page:128581
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Chang Jui-Che,Birch Jens,Gueorguiev Gueorgui Kostov,Bakhit Babak,Greczynski Grzegorz,Eriksson Fredrik,Sandström Per,Hultman Lars,Hsiao Ching-Lien

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference51 articles.

1. Evolution of surface oxidation on Ta3N5 as probed by a photoelectrochemical method;Li;ACS Appl. Mater. Interfaces,2021

2. Conduction and valence band positions of Ta2O5, TaON, and Ta3N5 by UPS and electrochemical methods;Chun;J. Phys. Chem. B,2003

3. Tuning the properties of visible-light-responsive tantalum (oxy)nitride photocatalysts by nonstoichiometric compositions: a first-principles viewpoint;Harb;Phys. Chem. Chem. Phys.,2014

4. The role of oxygen in magnetron- sputtered Ta3N5 thin films for the photo electrolysis of water;Rudolph;Surf. Coat. Technol.,2017

5. Optoelectronic properties of Ta3N5: a joint theoretical and experimental study;Morbec;Phys. Rev. B,2014

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1. Controlled synthesis of tantalum-based solid solution and exploration of electrochemical properties as soluble anode for molten salt electrolysis;International Journal of Refractory Metals and Hard Materials;2024-12

2. Study of selective etching of TaN with respect to SiOCH dielectrics using SiF₄ plasma processes;Japanese Journal of Applied Physics;2024-09-02

3. Stable Oxygen Incorporation in Superconducting TaN: An Experimental and Theoretical Assessment;ACS Omega;2024-08-01

4. Structural and mechanical properties of magnetron sputtered (NbxMo1-x)C thin films;Vacuum;2024-06

5. Investigation of dual work function metal (DWFM) gate stacks with ALD TaAlN and TaAlC for multi threshold voltages (VTHs) engineering in MOS device integration;Materials Science in Semiconductor Processing;2024-06

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