A study of the phase transformation of low temperature deposited tantalum thin films using high power impulse magnetron sputtering and pulsed DC magnetron sputtering-Reference-Cited by-同舟云学术

A study of the phase transformation of low temperature deposited tantalum thin films using high power impulse magnetron sputtering and pulsed DC magnetron sputtering

Published:2022-04 Issue: Volume:436 Page:128288
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Chen Wei-Chieh,Wang Zhao-Ying,Yu Chiao-Yi,Liao Bo-Huei,Lin Ming-Tzer

Funder

MOST

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference22 articles.

1. Evaluation of residual stress in sputtered tantalum thin-film;Clevenger;J. Appl. Phys.,1992

2. Effect of sputter pressure on Ta thin films: beta phase formation, texture, andstresses;Ellis;Acta Mater.,2018

3. Hardness enhancement in nanocrystalline tantalum thin films;Zhang;Scr. Mater.,2006

4. Texture and phase transformation of sputter-deposited metastable Ta films and Ta/Cu multilayers;Hoogeveen,1996

5. Phase tailoring of Ta thin films by highly ionized pulsed magnetron sputtering;Alami;Thin Solid Films,2007

Cited by 12 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effect of sputtering power and thickness ratios on the materials properties of Cu–W and Cu–Cr bilayer thin films using high power impulse magnetron and DC magnetron sputtering;Journal of Vacuum Science & Technology A;2024-08-28

2. Flexible and Disposable Hafnium Nitride Extended Gates Fabricated by Low-Temperature High-Power Impulse Magnetron Sputtering;Nanomaterials;2024-07-12

3. Manifestation on the choice of a suitable combination of MIS for proficient Schottky diodes for optoelectronic applications: A comprehensive review;Nano Energy;2024-06

4. Deformation mechanism of metastable oriented grains in high-purity tantalum under different strain paths;Journal of Materials Research and Technology;2024-05

5. Effect of sputtering rate on morphological alterations, corrosion resistance, and endothelial biocompatibility by deposited tantalum oxide coatings on NiTi using magnetron sputtering technique;Journal of Materials Research and Technology;2024-03