Deposition of titanium films on complex bowl-shaped workpieces using DCMS and HiPIMS

Author:

Xie Dong,Wei L.J.,Liu H.Y.,Zhang K.,Leng Y.X.,Matthews D.T.A.,Ganesan R.,Su Y.Y.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference42 articles.

1. Magnetron sputtering: a review of recent developments and applications;Kelly;Vacuum,2000

2. Self-shadowing and surface diffusion effects in obliquely deposited thin films[J];Vick;Thin Solid Films,1999

3. Perspectives on oblique angle deposition of thin films: from fundamentals to devices[J];Barranco;Prog. Mater. Sci.,2016

4. Structure, mechanical and corrosion properties of TiN films deposited on stainless steel substrates with different inclination angles by DCMS and HPPMS[J];Jiang;Surf. Coat. Technol.,2016

5. Comparative investigations of DCMS/HiPIMS reactively sputtered WO3 thin films for photo-electrochemical efficiency enhancements;Saksorn;Vacuum,2021

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号  京ICP备18003416号-3