Deposition of titanium films on complex bowl-shaped workpieces using DCMS and HiPIMS-Reference-Cited by-同舟云学术

Deposition of titanium films on complex bowl-shaped workpieces using DCMS and HiPIMS

Published:2022-07 Issue: Volume:442 Page:128192
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Xie Dong,Wei L.J.,Liu H.Y.,Zhang K.,Leng Y.X.,Matthews D.T.A.,Ganesan R.,Su Y.Y.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

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5. Comparative investigations of DCMS/HiPIMS reactively sputtered WO3 thin films for photo-electrochemical efficiency enhancements;Saksorn;Vacuum,2021

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