Comparative investigation of Ti–Si–N films magnetron sputtered using Ti5Si3+Ti and Ti5Si3+TiN targets-Reference-Cited by-同舟云学术

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Comparative investigation of Ti–Si–N films magnetron sputtered using Ti5Si3+Ti and Ti5Si3+TiN targets

Published:2004-04 Issue:2-3 Volume:182 Page:204-214
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Shtansky D.V,Lyasotsky I.V,D'yakonova N.B,Kiryukhantsev-Korneev F.V,Kulinich S.A,Levashov E.A,Moore J.J

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference33 articles.

1. Structural properties, internal stress and thermal stability of nc-TiN/a-Si3N4, nc-TiN/TiSix and nc-(Ti1−yAlySix)N superhard nanocomposite coatings reaching the hardness of diamond

2. Novel thermodynamically stable and oxidation resistant superhard coating materials

3. Reactively sputtered Ti-Si-N films I. Physical properties

4. Recent progress in the superhard nanocrystalline composites: towards their industrialization and understanding of the origin of the superhardness

5. Microstructure and properties of Ti–Si–N nanocomposite films

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5. Research on preparation and characterization of Ti-Ti5Si3 gradient composite porous material via in-situ reactive process;Journal of Alloys and Compounds;2022-04

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