Author:
Anashin V.V,Gorbunova N.A,Koop I.A,Naz'mov V.P,Osipov V.N,Pindyurin V.F
Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
3 articles.
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1. Investigation of the radiation-induced thermal flexure of an x-ray lithography mask during a tilted exposure;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2011-01
2. Reflectivity test of X-ray mirrors for deep X-ray lithography;Microsystem Technologies;2008-02-22
3. Reflection of photons and azimuthal distribution of photoelectrons in a cylindrical beam pipe;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;2000-06