Author:
Nazmov V.,Reznikova E.,Last A.,Boerner M.,Mohr J.
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Cited by
3 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Characterization of the surface contamination of deep X-ray lithography mirrors exposed to synchrotron radiation;Journal of Synchrotron Radiation;2018-04-24
2. Investigation of the radiation-induced thermal flexure of an x-ray lithography mask during a tilted exposure;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2011-01
3. Bandpass filters made by LIGA for the THZ region: Manufacturing and testing;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;2009-05