Analyse de couches minces d'oxydes de titane en spectroscopie d'électrons auger
Author:
Publisher
Elsevier BV
Subject
General Engineering
Reference16 articles.
1. Use of Auger Electron Spectroscopy and Inert Gas Sputtering for Obtaining Chemical Profiles
2. Implications in the use of secondary ion mass spectrometry to investigate impurity concentration profiles in solids
3. Ion beam sputtering - the effect of incident ion energy on atomic mixing in subsurface layers
4. Beam effects in Auger electron spectroscopy analysis of titanium oxide films
5. AES-ion sputtering analysis and the surface composition of TiO2
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2. Nb on (110) TiO2 (rutile): growth, structure, and chemical composition of the interface;Surface Science;2000-02
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