Preparation of patterned GaAs structures for MEMS and MOEMS
Author:
Publisher
Elsevier BV
Subject
Biomaterials,Bioengineering,Mechanics of Materials
Reference11 articles.
1. III–V micromachined devices for microsystems
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1. Low-Cost Plate-Type MOEMS Uniaxial Vibration Sensor Based on Metal Etching and Fiber Collimator Technique;IEEE Sensors Journal;2016-06
2. Effect of film thickness and laser energy density on the microstructure of a-GaAs films after excimer laser crystallization;Journal of Applied Physics;2007-07
3. Effect of Film Thickness and Laser Energy Density on the Structural Characteristics of Laser-Annealed Polycrystalline Gallium Arsenide Films;Materials, Nondestructive Evaluation, and Pressure Vessels and Piping;2006-01-01
4. Formation of GaAs three-dimensional objects using AlAs “facet-forming” sacrificial layer and H3PO4, H2O2, H2O based solution;Journal of Applied Physics;2003-10
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