III–V micromachined devices for microsystems-Reference-Cited by-同舟云学术

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III–V micromachined devices for microsystems

Published:1998-09 Issue:9 Volume:29 Page:613-619
ISSN:0026-2692
Container-title:Microelectronics Journal
language:en
Short-container-title:Microelectronics Journal

Author:

Leclercq J.L.,Ribas R.P.,Karam J.M.,Viktorovitch P.

Publisher

Elsevier BV

Subject

General Engineering

Reference23 articles.

1. Optical MEMS and their applications;Hjort,1996

2. Gallium arsenide as a mechanical material;Hjort;J. of Micromechanics and Microengineering,1994

3. Infrared thermopile sensor based on AlGaAsGaAs micromachining;Dehé;Sensors and Actuators A,1995

4. The piezoelectric effect of GaAs used for resonators and resonant sensors;Söderkvist;Sensors and Actuators A,1991

5. AlGaAs semiconductor pressure sensors;Zilionis;J. of Micromechanics and Microengineering,1994

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1. Materials: Silicon and beyond;Sensors and Actuators A: Physical;2019-09

2. Compound Semiconductors ☆;Reference Module in Materials Science and Materials Engineering;2017

3. Materials Aspects of Micro- and Nanoelectromechanical Systems;Springer Handbook of Nanotechnology;2017

4. Kinetic Investigation on the Confined Etching System of n-Type Gallium Arsenide by Scanning Electrochemical Microscopy;The Journal of Physical Chemistry C;2014-08-01

5. Micro Structuration of GaAs Surface by Wet Etching: Towards a Specific Surface Behavior;Journal of Nanoscience and Nanotechnology;2012-08-01

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