Strain-driven self-positioning of micromachined structures
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1371525
Reference5 articles.
1. Bulk micromachining characterization of 0.2 μm HEMT MMIC technology for GaAs MEMS design
2. Characterization of AlGaAs microstructure fabricated by AlGaAs/GaAs micromachining
3. Nanoscale engineering using controllable formation of ultra-thin cracks in heterostructures
4. The elastic constants of GaAs from 2 K to 320 K
5. Defects in epitaxial multilayers
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