Author:
Ribas R.P,Leclercq J.L,Karam J.M,Courtois B,Viktorovitch P
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference21 articles.
1. Gallium arsenide as a mechanical material;Hjort;J. Micromech. Microeng.,1994
2. Infrared thermopile sensor based on AlGaAs-GaAs micromachining;Dehe;Sensors and Actuators,1995
3. The piezoelectric effect of GaAs used for resonators and resonant sensors;Soderkvist;Sensors and Actuators,1991
4. AlGaAs semiconductor pressure sensors;Zilionis;J. Micromech. Microeng.,1994
5. Collective fabrication of gallium arsenide based microsystems;Karam;Proc. SPIE-micromachining and microfabrication process tech. II,1996
Cited by
20 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献