Reduction of effective barrier height and low-frequency noise of Al–GaAs Schottky contacts by hydrocarbon ion beam irradiation

Author:

Meškinis S.,Balčaitis G.,Matukas J.,Palenskis V.

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference22 articles.

1. Dry etching damage in III–V semiconductors;Murad;J. Vac. Sci. Technol. B,1996

2. Electrical characterization of He-plasma processed n-GaAs;Auret;J. Appl. Phys.,1998

3. Effect of ion sputtering on interface chemistry and electrical properties of Au–GaAs(100) Schottky contacts;Wang;J. Vac. Sci. Technol. B,1984

4. The effect of sputter cleaning on Au/GaAs contacts and the role of doping;Yeh Liu;J. Appl. Phys.,1989

5. Influence of the semiconductor substrate surface treatment on electrical characteristics of the metal–gallium arsenide contact;Palenskis;Lith. J. Phys.,1996

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