Role of inert gas additive on dry etch patterning of InGaP in planar inductively coupled BCl3 plasmas-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Role of inert gas additive on dry etch patterning of InGaP in planar inductively coupled BCl3 plasmas

Published:2004-01 Issue:1 Volume:48 Page:189-192
ISSN:0038-1101
Container-title:Solid-State Electronics
language:en
Short-container-title:Solid-State Electronics

Author:

Lee J.W.,Lim W.T.,Baek I.K.,Yoo S.R.,Jeon M.H.,Cho G.S.,Pearton S.J.,Abernathy C.R.

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference36 articles.

1. Handbook of advanced plasma processing;Pang,2000

2. CH4/H2/Ar/Cl2 electron cyclotron resonance plasma etching of via holes for InP-based microwave devices

3. Monitoring InP and GaAs etched in Cl2/Ar using optical emission spectroscopy and mass spectrometry

4. High Aspect Ratio Deep Via Holes in InP Etched Using Cl2 / Ar Plasma

5. Atomic force microscopy study of III–V materials etched using an electron cyclotron resonance source

Cited by 26 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Depth profile study on Ti/Al bilayer Ohmic contacts to AlGaN/GaN;Materials Today: Proceedings;2021

2. Selective Annealing Effects in Asymmetric Metal-semiconductor-metal AlGaN UV Sensors;JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE;2020-12-31

3. The Cryogenic Temperature Behavior of Bipolar, MOS, and DTMOS Transistors in Standard CMOS;IEEE Journal of the Electron Devices Society;2018

4. Investigation of Post Oxidation Annealing Effect on H2O2-Grown-Al2O3/AlGaN/GaN MOSHEMTs;IEEE Journal of the Electron Devices Society;2016-09

5. Barrier height inhomogeneity and its impact on (Al,In,Ga)N Schottky diodes;Journal of Applied Physics;2016-02-14

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3