Selective Annealing Effects in Asymmetric Metal-semiconductor-metal AlGaN UV Sensors
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Published:2020-12-31
Issue:6
Volume:20
Page:510-517
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ISSN:1598-1657
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Container-title:JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE
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language:en
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Short-container-title:JSTS
Author:
Park Byeong-Jun,Seol Jeong-Hoon,Hahm Sung-Ho
Publisher
The Institute of Electronics Engineers of Korea
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials