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Disclosing the annihilation effect of ion-implantation induced defects in single-crystal diamond by resonant MEMS

  • Published:2023-10 Issue: Volume:138 Page:110240
  • ISSN:0925-9635
  • Container-title:Diamond and Related Materials
  • language:en
  • Short-container-title:Diamond and Related Materials

Author:

Chen Guo,Zhang Zilong,Koide Yasuo,Koizumi Satoshi,Huang Zhaohui,Liao Meiyong

Funder

Japan Society for the Promotion of Science

Ministry of Education, Culture, Sports, Science and Technology

Chinese Academy of Sciences

China Scholarship Council

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Materials Chemistry,Mechanical Engineering,General Chemistry,Electronic, Optical and Magnetic Materials

Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Low-Energy Dissipation Diamond MEMS;Accounts of Materials Research;2024-07-29

2. High-order resonance of single-crystal diamond MEMS with high-quality factor at high temperatures;2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS);2024-05-02

3. Oxygen-termination effect on the surface energy dissipation in diamond MEMS;Carbon;2024-05

4. Higher-order resonance of single-crystal diamond cantilever sensors toward high f‧Q products;Applied Physics Express;2024-02-01
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