Subject
Electrical and Electronic Engineering,Physical and Theoretical Chemistry,Condensed Matter Physics,General Chemical Engineering,Electronic, Optical and Magnetic Materials
Reference234 articles.
1. International Technology Roadmap for Semiconductors, 2009, 2010.http://www.itrs.net/Links/2009ITRS/Home2009.htm
2. Nanoelectromechanical systems
3. MEMS: A Practical Guide to Design, Analysis, and Applications
4. Fabrication of single-crystal Si cantilever array
5. Sandia Corporation, 2005–2008.http://mems.sandia.gov/
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