Low-Energy Dissipation Diamond MEMS-Reference-Cited by-同舟云学术

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Low-Energy Dissipation Diamond MEMS

Published:2024-07-29 Issue: Volume: Page:
ISSN:2643-6728
Container-title:Accounts of Materials Research
language:en
Short-container-title:Acc. Mater. Res.

Author:

Chen Guo¹²,Koizumi Satoshi¹,Koide Yasuo¹,Liao Meiyong¹^ORCID

Affiliation:

1. Research Center for Electronic and Optical Materials, National Institute for Materials Science, 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan

2. China University of Geosciences (Beijing), No.29, Xueyuan Road, Haidian District, Beijing 100083, P.R. China

Funder

Ministry of Education, Culture, Sports, Science and Technology

Japan Society for the Promotion of Science

China Scholarship Council

Chinese Academy of Sciences

Publisher

American Chemical Society (ACS)

Link

https://pubs.acs.org/doi/pdf/10.1021/accountsmr.4c00139

Reference57 articles.

1. Diamond MEMS: From Classical to Quantum

2. Nanodevice motion at microwave frequencies

3. Dissipation in nanoelectromechanical systems

4. Progress in semiconductor diamond photodetectors and MEMS sensors

5. Diamond electrochemistry at the nanoscale: A review

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