Substrate removal structures for AlScN/diamond surface acoustic wave resonators-Reference-Cited by-同舟云学术

Substrate removal structures for AlScN/diamond surface acoustic wave resonators

Published:2023-03 Issue: Volume:133 Page:109726
ISSN:0925-9635
Container-title:Diamond and Related Materials
language:en
Short-container-title:Diamond and Related Materials

Author:

Chen Yanpu,Zhao Jiaxin,Yang Yuanjie,Lin Shengran,Wang Peng,Lou Liren,Zhu Wei,Wang Guanzhong

Funder

National Natural Science Foundation of China

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Materials Chemistry,Mechanical Engineering,General Chemistry,Electronic, Optical and Magnetic Materials

Reference42 articles.

1. Application of surface acoustic waves for optimisation of biocompatibility of carboxymethylated dextran surfaces;Markovic;Surf. Coat. Technol.,2006

2. Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications;Fu;Prog. Mater. Sci.,2017

3. Quantitative assessment of acoustic pressure in one-dimensional acoustofluidic devices driven by standing surface acoustic waves;Liu;Appl. Phys. Lett.,2017

4. Methods for improving electromechanical coupling coefficient in two dimensional electric field excited AlN lamb wave resonators;Sun;Appl. Phys. Lett.,2015

5. A wireless and passive online temperature monitoring system for GIS based on surface-acoustic-wave sensor;Ma;IEEE Trans. Power Deliv.,2016

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1. Surface and bulk acoustic wave resonators based on aluminum nitride for bandpass filters;AAPPS Bulletin;2024-04-08

2. Finite element simulation of Rayleigh surface acoustic wave in (100) AlN/(100) ZnO/diamond layered structure;Optoelectronics Letters;2023-12

3. Density functional theory insights of phonons modes behaviours in AlScN for surface acoustic wave applications;Materials Today Communications;2023-08