Effects of hydrogen on the properties of Si-incorporated diamond-like carbon films prepared by pulsed laser deposition-Reference-Cited by-同舟云学术

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Effects of hydrogen on the properties of Si-incorporated diamond-like carbon films prepared by pulsed laser deposition

Published:2011-04 Issue:4 Volume:20 Page:485-491
ISSN:0925-9635
Container-title:Diamond and Related Materials
language:en
Short-container-title:Diamond and Related Materials

Author:

Nakazawa H.,Osozawa R.,Okuzaki T.,Sato N.,Suemitsu M.,Abe T.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Materials Chemistry,Mechanical Engineering,General Chemistry,Electronic, Optical and Magnetic Materials

Reference38 articles.

1. Tribological properties and characterization of diamond-like carbon coatings with silicon prepared by plasma-assisted chemical vapour deposition

2. Effect of excess carbon on the hardness of SiC and TiC coatings formed by plasma-assisted chemical vapor deposition

3. Low friction coatings of diamond-like carbon with silicon prepared by plasma-assisted chemical vapor deposition

4. Two different low friction mechanisms of diamond-like carbon with silicon coatings formed by plasma-assisted chemical vapor deposition

5. Improved high-temperature stability of Si incorporated a-C:H films

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A review on diamond-like carbon films grown by pulsed laser deposition;Applied Surface Science;2021-03

2. Structural and corrosion study of a-C film with Ti, Cr and Ni interlayers;NATIONAL CONFERENCE ON PHYSICS AND CHEMISTRY OF MATERIALS: NCPCM2020;2021

3. Effect of discharge power and silicon content on optical and mechanical properties of carbon-rich amorphous silicon carbide films obtained by PECVD;Journal of Alloys and Compounds;2019-09

4. Impacts of substrate bias and dilution gas on the properties of Si-incorporated diamond-like carbon films by plasma deposition using organosilane as a Si source;Thin Solid Films;2018-05

5. Synthesis of boron/nitrogen-incorporated diamond-like carbon films by pulsed laser deposition using nitrogen gas and a boron-containing graphite target;Japanese Journal of Applied Physics;2017-09-04

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