Effect of excess carbon on the hardness of SiC and TiC coatings formed by plasma-assisted chemical vapor deposition
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference15 articles.
1. Proc. 9th Int. Conf. on Chemical Vapor Deposition;Kikuchi,1984
2. Neue Entwicklungen zur Herstellung von Hartstoffschichten mittles Plasma-CVD
3. Deposition of TiN and Ti(O,C,N) hard coatings by a plasma assisted chemical vapor deposition process
4. Composition, morphology and mechanical properties of plasma-assisted chemically vapor-deposited TiN films on M2 tool steel
5. Dependence of the hardness of titanium nitride prepared by plasma chemical vapour deposition on the gas flow rate and the r.f. power
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4. XPS study of vapour deposited wear-resistant coatings implanted with nitrogen and carbon ions;Ion Beam Modification of Materials;1996
5. Preparation and properties of amorphous hydrogenated a-Si1−xCx:H coatings deposited by RF plasma-enhanced CVD;Diamond and Related Materials;1992-04
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