Deposition of TiN, TiC, and DLC Coatings by PACVD

Abstract

In this chapter, the author studied about titanium nitride (TiN), titanium carbide (TiC), diamond like carbon (DLC) single and multilayer coatings that utilize in harsh environments. These hard coatings were usually produced by the plasma assisted chemical vapor deposition (PACVD) method as a modern technique. PACVD is used to deposit thin coatings for different usages such as computer disc drives, automobile and aerospace parts, surgical/medical instruments and the food industry. The author tried to delineate the state of the performance of different coating systems and layer characteristics that suitable either for laboratory -scales or industrial applications. Mechanical features of these coatings contain the hardness, the toughness, the wear resistance and structural properties that were perused. Consequently, this chapter offers a source of information for those who want to familiarize with the knowledge in the area of materials science of functional coatings that was produced by new plasma-based technologies.