Spectroscopic study on the evolution of graphite ablation plume in ECR argon plasma during the deposition of diamond-like carbon films-Reference-Cited by-同舟云学术

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Spectroscopic study on the evolution of graphite ablation plume in ECR argon plasma during the deposition of diamond-like carbon films

Published:2007-01 Issue:1 Volume:16 Page:124-130
ISSN:0925-9635
Container-title:Diamond and Related Materials
language:en
Short-container-title:Diamond and Related Materials

Author:

Gong Z.S.,Sun J.,Xu N.,Ying Z.F.,Lu Y.F.,Yu D.,Wu J.D.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Materials Chemistry,Mechanical Engineering,General Chemistry,Electronic, Optical and Magnetic Materials

Reference21 articles.

1. Pulsed Laser Processing of Carbon and Silicon Clusters and Thin Films

2. Fullerene production driven by long-pulses of near-infrared laser radiation

3. Pulsed laser deposition and modification of diamondlike carbon films

4. Pulsed laser deposition of diamond-like carbon coatings for industrial tribological applications

5. Experimental Realization of the Covalent Solid Carbon Nitride

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Silicon wafer etching by pulsed high-power inductively coupled Ar/CF4 plasma with 150 kHz band frequency;Japanese Journal of Applied Physics;2020-03-05

2. Ellipsometric study of nanostructured carbon films deposited by pulsed laser deposition;Thin Solid Films;2011-02

3. Temporal evolution of the laser-induced plasma generated by IR CO2 pulsed laser on carbon targets;Journal of Applied Physics;2009-08

4. Effects of working pressure on the deposition of diamond-like carbon films prepared by bipolar-type plasma based ion implantation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2009-05

5. The particle-in-cell simulation and Monte Carlo collision simulation of the interaction between electrons and microwave in electron cyclotron resonance discharge;Acta Physica Sinica;2009

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