The particle-in-cell simulation and Monte Carlo collision simulation of the interaction between electrons and microwave in electron cyclotron resonance discharge

Abstract

The theoretical and computational model is presented to study the interaction between electrons and microwave in electron cyclotron resonance discharge. The interaction between charged particles and microwave is described by particle-in-cell method, the collisions and the interaction between charged particles and boundaries of system are described by Monte Carlo collision method. The quasi-three-dimensional simulation code is original. And the spatio-temporal evolvements of electron energy and microwave field in ECR discharge is diagnosed.