Effects of working pressure on the deposition of diamond-like carbon films prepared by bipolar-type plasma based ion implantation
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference15 articles.
1. Handbook of Plasma Immersion Ion Implantation and Deposition;Anders,2000
2. Deposition of diamond-like carbon films using plasma source ion implantation with pulsed plasmas
3. Deposition of diamond-like carbon films using plasma based ion implantation with bipolar pulses
4. Diamond-like amorphous carbon
5. Effects of positively and negatively pulsed voltages on the microstructure of DLC films prepared by bipolar-type plasma based ion implantation
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1. Synthesis of Ag-doped hydrogenated carbon thin films by a hybrid PVD–PECVD deposition process;Bulletin of Materials Science;2014-12
2. Analysis of hydrogenated amorphous carbon films deposited by middle frequency pulsed unbalanced magnetron sputtering;Journal of Non-Crystalline Solids;2013-03
3. Modeling and Optimization of Nanomechanics of Diamond-Like Carbon by MPCVD Using Response Surface Methodology;Advanced Materials Research;2009-08
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