UV detection for excimer lamps using CVD diamond in various gaseous atmospheres
Author:
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Materials Chemistry,Mechanical Engineering,General Chemistry,Electronic, Optical and Magnetic Materials
Reference10 articles.
1. Atmospheric-pressure plasma technology
2. Direct nitridation of high-k metal oxide thin films using argon excimer sources
3. Direct Si oxidation with fluorine incorporation using an argon excimer VUV source
4. Diamond photodetectors for next generation 157-nm deep-UV photolithography tools
5. Diamond power devices. Concepts and limits
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