1. Multi layer resist systems;Lin,1983
2. Materials and Processes for Nanometer Lithography;Mackie;Solid State Technology,1985
3. A simple Metal Lift-off Process for 1 micron Al/5% Cu Lines;Batchelder;Solid State Technology,1982
4. Feature size Limit of Lift-off Metallisation Technology;Homma;IEEE Transactions on Electron Devices, ED-29,1982