1. Lawrence V. Gregor, Thin-film processes for microelectronic application, in: Proceedings of the IEEE, vol. 59, No. 10, October 1971.
2. David T. Read, Alex A. Volinsky, Thin Films for Microelectronics and Photonics: Physics, Mechanics, Characterization and Reliability, Micro- and Opto-Electronic Materials and Structures: Physics, Mechanics, Design, Reliability, Packaging 2007, pp. A135–A180 (http://link.springer.com/chapter/10.1007%2F0-387-32989-7_4).
3. Process-dependent thin-film thermal conductivities for thermal CMOS MEMS
4. Development and optimisation of a metal lift-off process
5. Silicon Processing for the VLSI Era, vol. 1;Wolf,2004