Fabricating metal structures with taper angles and smooth sidewalls-Reference-Cited by-同舟云学术

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Fabricating metal structures with taper angles and smooth sidewalls

Published:2017-11-07 Issue:12 Volume:27 Page:125011
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Fu Jianyu^ORCID,Li Junjie,He Xiaobin,Yu Jiahan,Zhou Na,Jiang Qifeng,Li Junfeng,Wang Weibing,Zhao Chao

Funder

Chinese Academy of Sciences-Peking University Pioneer Cooperation Team

National Natural Science Foundation of China

Hi-Tech Research Development Program of China

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Link

http://iopscience.iop.org/article/10.1088/1361-6439/aa8c43/pdf

Reference24 articles.

1. Electromigration in integrated circuit interconnects studied by X-ray microscopy

2. Plasma etch chemistry of aluminum and aluminum alloy films

3. Chemical Etching and Patterning of Copper, Silver, and Gold Films at Low Temperatures

4. Gold electrodeposition for microelectronic, optoelectronic and microsystem applications

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