Flexible nanopositioning actuators based on functional nanocomposites-Reference-Cited by-同舟云学术

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Flexible nanopositioning actuators based on functional nanocomposites

Published:2020-01 Issue: Volume:186 Page:107937
ISSN:0266-3538
Container-title:Composites Science and Technology
language:en
Short-container-title:Composites Science and Technology

Author:

Chen Hairong,Liu Wanwan,Xia Hong,Qiu Yiping,Ni Qing-Qing,Fu Yaqin

Funder

Japan Society for the Promotion of Science

Anhui Province International Science and Technology Cooperation Program, China

Publisher

Elsevier BV

Subject

General Engineering,Ceramics and Composites

Reference37 articles.

1. High resolution optical lithography or high throughput electron beam lithography: the technical struggle from the micro to the nano-fabrication evolution;Okazaki;Microelectron. Eng.,2015

2. Deep X-ray lithography for the production of three-dimensional microstructures from metals, polymers and ceramics;Ehrfeld;Radiat. Phys. Chem.,1995

3. Focused ion beam lithography;Melngailis;Nucl. Instrum. Methods Phys. Res. B,1993

4. Nanofabrication by electron beam lithography and its applications: a review;Chen;Microelectron. Eng.,2015

5. Sub-10 nm feature chromium photomasks for contact lithography patterning of square metal ring arrays;Park;Sci. Rep.,2016

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