Sub-10 nm feature chromium photomasks for contact lithography patterning of square metal ring arrays
Author:
Publisher
Springer Science and Business Media LLC
Subject
Multidisciplinary
Link
http://www.nature.com/articles/srep23823.pdf
Reference34 articles.
1. Tseng, A. A., Chen, K., Chen, C. D. & Ma, K. J. Electron beam lithography in nanoscale fabrication: recent development. IEEE T. Electron. Pack. 26, 141–149 (2003).
2. Schift, H. Nanoimprint lithography: An old story in modern times? A review. J. Vac. Sci. Technol. B 26, 458 (2008).
3. Xia, Y. N. & Whitesides, G. M. Soft lithography. Angew. Chem. Int. Edit. 37, 550–575 (1998).
4. Cavallini, M., Gentili, D., Greco, P., Valle, F. & Biscarini, F. Micro- and nanopatterning by lithographically controlled wetting. Nat. Protoc. 7, 1668–1676 (2012).
5. Garcia, R., Martinez, R. V. & Martinez, J. Nano-chemistry and scanning probe nanolithographies. Chem. Soc. Rev. 35, 29–38 (2006).
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