Direct liquid injection MOCVD of high quality PLZT films
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference10 articles.
1. Topics in electronic ceramics
2. Recent advances in physical vapor growth processes for ferroelectric thin films
3. Preparation and properties of (Pb,La)(Zr,Ti)O3thin films by metalorganic chemical vapor deposition
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5. Single liquid source plasma‐enhanced metalorganic chemical vapor deposition of high‐quality YBa2Cu3O7−xthin films
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1. Direct Liquid Injection Chemical Vapor Deposition;Chemical Vapor Deposition for Nanotechnology;2019-01-10
2. Effect of excess Pb on ferroelectric characteristics of conductive Al-doped ZnO and Sn-doped In2O3 top electrodes in PbLaZrTiO x capacitors;International Journal of Materials Research;2015-01-07
3. FERROELECTRIC AND PIEZOELECTRIC PROPERTIES OF Pb(Mg1/3Nb2/3)O3-PbTiO3 THIN FILMS BY MOCVD USING ULTRASONIC NEBULIZATION;Integrated Ferroelectrics;2007-04-18
4. Preparation of Pb(Mg1/3Nb2/3)O3-PbTiO3 thin films by MOCVD using ultrasonic nebulization;Journal of Electroceramics;2006-12
5. The Characteristics of Pb(Mg1/3, Nb2/3)O3–PbTiO3 Thin Films Made by Ultrasonic Spraying MOCVD;Ferroelectrics;2006-09
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