Low‐temperature metalorganic chemical vapor deposition of perovskite Pb(ZrxTi1−x)O3thin films

Author:

Peng Chien H.,Desu Seshu B.

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Cited by 75 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

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5. Atomic layer deposition of PbTiO3 and PbZrxTi1-xO3 films using metal alkyl and alkylamide precursors;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2018-05

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