Optical properties of diamond-like transitional films produced by dc plasma deposition of acetylene
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference17 articles.
1. Special Issue: Diamond Films and Related Materials,1992
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4. Deposition mechanism of hydrogenated hard‐carbon films in a CH4rf discharge plasma
5. The properties ofa‐C:H films deposited by plasma decomposition of C2H2
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4. High density plasma oxide etching using nitrogen trifluoride and acetylene;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2000-11
5. Chemical kinetics in low pressure acetylene radio frequency glow discharges;Journal of Applied Physics;1997-11-15
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