Experimental and calculational study on diamond growth by an advanced hot filament chemical vapor deposition method
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.351856
Reference18 articles.
1. Infrared detection of gaseous species during the filament‐assisted growth of diamond
2. Measurement of stable species present during filament‐assisted diamond growth
3. Hydrogen atom detection in the filament‐assisted diamond deposition environment
4. A study of gas chemistry during hot‐filament vapor deposition of diamond films using methane/hydrogen and acetylene/hydrogen gas mixtures
5. An investigation of product distributions in microwave plasma for diamond growth
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3. Numerical calculation of temperature, velocity, and species concentration distributions in a hot filament chemical vapor deposition in a reactor using a CH4/H2 mixture;Journal of Engineering and Applied Science;2022-08-19
4. Microstructure of Carbon Film Deposited Using Hot-Filament Chemical Vapor Deposition;Korean Journal of Metals and Materials;2015-02-05
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