Structure characterization of CVD amorphous Si3N4 by pulsed neutron total scattering-Reference-Cited by-同舟云学术

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Structure characterization of CVD amorphous Si3N4 by pulsed neutron total scattering

Published:1979-12 Issue:3 Volume:34 Page:313-321
ISSN:0022-3093
Container-title:Journal of Non-Crystalline Solids
language:en
Short-container-title:Journal of Non-Crystalline Solids

Author:

Misawa M.,Fukunaga T.,Niihara K.,Hirai T.,Suzuki K.

Publisher

Elsevier BV

Subject

Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Reference7 articles.

1. Chemical vapour-deposited silicon nitride

2. An X-ray diffraction study of the amorphous structure of chemically vapor-deposited silicon nitride

3. Time-of-flight pulsed neutron diffraction of liquids using an electron linac

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