From Jekyll to Hyde and Beyond: Hydrogen’s Multifaceted Role in Passivation, H-Induced Breakdown, and Charging of Amorphous Silicon Nitride-Reference-Cited by-同舟云学术

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From Jekyll to Hyde and Beyond: Hydrogen’s Multifaceted Role in Passivation, H-Induced Breakdown, and Charging of Amorphous Silicon Nitride

Published:2024-01-18 Issue:3 Volume:15 Page:840-848
ISSN:1948-7185
Container-title:The Journal of Physical Chemistry Letters
language:en
Short-container-title:J. Phys. Chem. Lett.

Author:

Cottom Jonathon¹^ORCID,Hückmann Lukas¹^ORCID,Olsson Emilia²³,Meyer Jörg¹^ORCID

Affiliation:

1. Leiden Institute of Chemistry, Gorlaeus Laboratories, Leiden University, P.O. Box 9502, 2300 RA Leiden, The Netherlands

2. Advanced Research Center for Nanolithography, Science Park 106, 1098 XG Amsterdam, The Netherlands

3. Institute for Theoretical Physics, University of Amsterdam, Postbus 94485, 1090 GL Amsterdam, The Netherlands

Funder

Holland High Tech

Dutch Research Council (NWO)

SURF cooperative

Publisher

American Chemical Society (ACS)

Link

https://pubs.acs.org/doi/pdf/10.1021/acs.jpclett.3c03376

Reference72 articles.

1. Automotive and industrial applications of structural ceramics in Japan

2. Preparation and Properties of Pyrolytic Silicon Nitride

3. Approaching Defect-free Amorphous Silicon Nitride by Plasma-assisted Atomic Beam Deposition for High Performance Gate Dielectric

4. Ultra-Thin Silicon Nitride X-Ray Windows

5. Performance and Properties of Ultra-Thin Silicon Nitride X-ray Windows

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1. Effects of Hydrogen Bonding in Silicon Nitride/Polyimide Passivation Bilayer in SiC Power Devices;physica status solidi (a);2024-06-02

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