Low defect density a-Si, Ge:H alloy films produced by magnetron sputtering from separate Si and Ge cathodes-Reference-Cited by-同舟云学术

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Low defect density a-Si, Ge:H alloy films produced by magnetron sputtering from separate Si and Ge cathodes

Published:1985-12 Issue: Volume:77-78 Page:885-888
ISSN:0022-3093
Container-title:Journal of Non-Crystalline Solids
language:en
Short-container-title:Journal of Non-Crystalline Solids

Author:

Rudder R.A.,Parsons G.N.,Cook J.W.,Lucovsky G.

Publisher

Elsevier BV

Subject

Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. Preferential Attachment of H in Amorphous Hydrogenated Binary Semiconductors and Consequent Inferior Reduction of Pseudogap State Density

2. Reactively sputtereda‐SixGe1−x:H alloys with compositional gradient in plane of film

3. Preparation of photoconductive a-SiGe alloy by glow discharge

4. Structural, electrical, and optical properties ofa-Si1−xGex:H and an inferred electronic band structure

5. Dark conductivity and photoconductivity of hydrogenated amorphous Si1−xGexalloys

Cited by 11 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Comparison of the structural, electrical, and optical properties of amorphous silicon-germanium alloys produced from hydrides and fluorides;Physical Review B;1988-09-15

2. Properties of intrinsic and doped a‐Si:H deposited by remote plasma enhanced chemical vapor deposition;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1988-05

3. A review of amorphous silicon alloys;Journal of Non-Crystalline Solids;1987-07

4. Photoelectronic properties of a‐Si:H and a‐Ge:H thin films in surface cell structures;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1987-07

5. Bonding defects in amorphous silicon alloys;Solar Cells;1987-06

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