Effects of proton beam irradiation on the physical and chemical properties of IGTO thin films with different thicknesses for thin-film transistor applications

Author:

Shin Min-Gyu,Hwang Seong-Hyun,Cha Hyun-Seok,Jeong Hwan-Seok,Kim Dae-Hwan,Kwon Hyuck-InORCID

Funder

National Research Foundation of Korea

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,General Physics and Astronomy,Condensed Matter Physics,Surfaces and Interfaces,General Chemistry

Reference43 articles.

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2. Structural, optical and thermoelectric properties of Al-doped ZnO thin films prepared by spray pyrolysis;Ambedkar;Surf. Interfac.,2020

3. Structural, optical and photocatalysis properties of sol-gel deposited Al-doped ZnO thin films;Islam;Surf. Interfac.,2019

4. Rapid thermal annealing effect of transparent ITO source and drain electrode for transparent thin film transistors;Park;Ceram. Int.,2020

5. The impact of plasma-enhanced atomic layer deposited ZrSiOx insulators on low voltage operated In-Sn-Zn-O thin film transistors;Kim;Ceram. Int.,2019

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